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Manufacturing Techniques for Microfabrication and Nanotechnology, Hardback
04e94b97-0b72-5827-9747-bad071362984
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Descriere
Focuses on various trends in industrial lithography and pattern transfer. This book covers photo lithography and next generation lithographies and presents a number of subtractive etching techniques, including dry, chemical, and electrochemical wet. It explains thermal, electro thermal, and mechanical removing techniques.
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- Publisher: Taylor & Francis Inc
- Author(s): Marc J. (University of California, Irvine, USA) Madou
- Illustration(s): This is a full color book; 9/12 - MISSPELLING ON SPINE OF COVER; 112 Tables, black and white; 625 Illustrations, color
- Number of pages: 670
- Publication date: 2011
- Dimensions: 286 x 227 x 29
- Cover type: Hardback
Detalii
- Autor
- ***
- Editura
- Taylor & Francis Inc
- Anul aparitiei
- 2.011
- Luna aparitiei
- 7
- Tip coperta
- Cartonata
- Numar de pagini
- 670
- Format
- 286 x 227
- ISBN
- 1420055194
- Cod de bare
- 9781420055191
- Limba
- Engleza